Amorphous Carbon and Silica-based Films Synthesized by Atmospheric Pressure Plasma CVD Method
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Date
2013-03-23
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
慶應義塾大学理工学研究科
Abstract
Description
博士（工学）, 2012, 開放環境科学専攻
Keywords
大気圧プラズマ, DLC, シリカ, 薄膜, 化学蒸着, Atmospheric pressure plasma, DLC, silica, thin film, CVD